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Los Alamos National LaboratoryCenter for Integrated Nanotechnologies
Helping you understand, create, and characterize nanomaterials
DOE

Integration Lab

The CINT Integration Laboratory is a 9000 sq. foot class 100 cleanroom micro/nano fabrication facility.

Contacts  

  • Integration Lab Manager
  • John Nogan
  • Sandia National Laboratory
  • Email
  • Process Technologist
  • Denise B. Webb
  • Sandia National Laboratory
  • Email
  • Equipment Technologist
  • Joseph Lucero
  • Sandia National Laboratory
  • Email
  • CINT Technician/E-beam writer
  • Tony James
  • Sandia National Laboratory
  • Email
  • General Technologist
  • Bill Ross
  • Sandia National Laboratory
  • Email
Prospective users are encouraged to familiarize themselves with the descriptive information on this web site prior to submitting a CINT User Proposal to ensure that the desired objectives are feasible.

Integration Laboratory Capabilities

Integration Lab allows CINT staff and users to integrate nano-enabled components using up to 100 mm wafer processing technology.

Integration Lab allows CINT staff and users to integrate nano-enabled components using up to 100 mm wafer processing technology.

The Integration Laboratory capabilities include five generic processing areas: Contact Lithography, Plasma Systems, Wet Processes, Physical Vapor Deposition and Thermal Processes. Through the facility, CINT staff and users can work with samples as large as 100mm and as small as 20nm.  Please see the Tool Sets list.

Tool Sets

The facility tool sets range from plasma deposition and etching to focused ion beam nano-fabrication. The Integration Laboratory is staffed by a team of process engineers with over 60 years of combined micro-processing experience. Access to the Integration Laboratory tool sets is obtained via the CINT user program.

Lab Staffing

Feasibility questions should be directed to the Integration Laboratory manager, John Nogan.

Training Requirement

As with all approved CINT user projects, the user(s) conducting the work in the Integration Laboratory are required to successfully complete the appropriate training for their project.