Integration Lab

The CINT Integration Laboratory is a 9000 sq. foot class 100 cleanroom micro/nano fabrication facility. The facility instruments can accommodate samples as large as 100mm diameter wafers. Individual feature sizes as small as 20 nm can be fabricated using e-beam lithography.

The facility tool sets range from plasma deposition and etching to focused ion beam nano-fabrication. The Integration Laboratory is staffed by a team of process engineers with over 60 years of combined micro-processing experience. Access to the Integration Laboratory tool sets is obtained via the CINT user program.



Prospective users are encouraged to familiarize themselves with the descriptive information on this web site prior to submitting a CINT User Proposal to ensure that the desired objectives are feasible. Feasibility questions should be directed to the Integration Laboratory manager, John Nogan.



As with all approved CINT user projects, the user(s) conducting the work in the Integration Laboratory are required to successfully complete the appropriate training for their project.

Click on the following to learn more about the Integration Laboratory:

Cleanroom 04-07-08 185 Cleanroom 04-07-08 188