Arrays of dielectric or plasmonic resonators (metasurfaces or photonic crystals) or single nanoantennascan be fabricated using a variety of tools and techniques including electron beam lithography, liftoff, etching, focused ion beam milling, etc. We routinely fabricate metasurfaces of dielectric materials such as TiO₂, silicon and a variety of III-V semiconductors such as GaAs, InGaAs, AlGaAs, etc. The metasurfaces can be patterned directly onto the semiconductor substrates or transferred onto transparent substrates such as quartz or sapphire. Typical dimensions range from 50 to hundreds of nanometers or microns. Target wavelengths can range from the visible to the mid–far infrared.

Contact: Igal Brener

Research Highlight:
Strong Coupling in the Sub-Wavelength Limit Using Metamaterial Nanocavities
Benz, A.; Campione, S.; Liu, S.; Montaño, I.; Klem, J. F.; Allerman, A.; Wendt, J. R.; Sinclair, M. B.; Capolino, F.; Brener, I. Nature Communications 2013, 4 (1). doi.org/10.1038/ncomms3882