Center for Integrated Nanotechnologies

Helping you understand, create, and characterize nanomaterials

Metamaterials and Plasmonic Nanofabrication

Extensive capabilities for nanofabrication of plasmonic and metamaterial samples, on both passive, dielectric substrates (glass or undoped semiconductors) and active, semiconductor heterostructure substrates

Arrays of dielectric or plasmonic resonators (metasurfaces or photonic crystals) or single nanoantennascan be fabricated using a variety of tools and techniques including electron beam lithography, liftoff, etching, focused ion beam milling, etc. We routinely fabricate metasurfaces of dielectric materials such as TiO2, silicon and a variety of III-V semiconductors such as GaAs, InGaAs, AlGaAs, etc. The metasurfaces can be patterned directly onto the semiconductor substrates or transferred onto transparent substrates such as quartz or sapphire. Typical dimensions range from 50 to hundreds of nanometers or microns. Target wavelengths can range from the visible to the mid–far infrared.

Contact: Igal Brener

Research Highlight:
Strong Coupling in the Sub-Wavelength Limit Using Metamaterial Nanocavities
Benz, A.; Campione, S.; Liu, S.; Montaño, I.; Klem, J. F.; Allerman, A.; Wendt, J. R.; Sinclair, M. B.; Capolino, F.; Brener, I. Nature Communications 2013, 4 (1).
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