Deposit epitaxial thin films, heterostructures, multilayers, superlattices, and nanocomposite films with
desired properties including superconductivity, ferroelectricity, piezoelectricity, and ferromagnetism.
Capabilities include:
- Over 500 ceramic targets of oxides, metals, other compounds.
- Four pulsed-laser deposition systems for thin film growth.
- One PLD chamber designed for actinide thin film synthesis.
- Reflection high-energy electron diffraction (RHEED) for in-situ growth monitoring.
- Combinatorial high throughput thin film synthesis.
Contact: Aiping Chen
