Capabilities include:

• 6 operational accelerators with a 7^th being installed ranging in ion landing energy from 1 keV to 70 MeV.
• Each accelerator has access to a variety of in-situ characterization capabilities, such as in-situ photoluminescence, single ion counting, up to 1200°C heating, cryogenic cooling, etc.
• Diamond-dedicated UHV annealer and tube furnace with in-atmosphere annealing up to 1200°C.

Contact: Michael Titze

Research Highlights:

In Situ Ion Counting for Improved Implanted Ion Error Rate and Silicon Vacancy Yield Uncertainty
Titze, M.; Byeon, H.; Flores, A.; Henshaw, J.; Harris, C. T.; Mounce, A. M.; Bielejec, E. S. Nano Letters 2022, 22 (8), 3212–3218. doi.org/10.1021/acs.nanolett.1c04646

Long-range cooperative resonances in rare-earth ion arrays inside photonic resonators Pak, D.; Nandi, A.; Titze, M.; Bielejec, E. S.; Alaeian, H.; Hosseini, M. Communications Physics 2022, 5 (1). doi.org/10.1038/s42005-022-00871-w

Large-scale integration of artificial atoms in hybrid photonic circuits
Wan, N. H.; Lu, T.-J.; Chen, K. C.; Walsh, M. P.; Trusheim, M. E.; De Santis, L.; Bersin, E. A.; Harris, I. B.; Mouradian, S. L.; Christen, I. R.; Bielejec, E. S.; Englund, D. Nature 2020, 583 (7815), 226–231. doi.org/10.1038/s41586-020-2441-3