Center for Integrated Nanotechnologies

Helping you understand, create, and characterize nanomaterials

CINT Capabilities Database

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Capability Description Contact NSRC
III-V Compound Semiconductor Epitaxial Growth Systems Explore leading-edge epitaxial growth technologies - CINT offers two epitaxial growth technologies for III-V semiconductors: Molecular Beam Epitaxy (MBE) and Metal Organic Chemical Vapor Deposition (MOCVD). Sadhvikas Addamane CINT
IV Semiconductor Chemical Vapor Deposition A chemical vapor deposition (CVD) reactor, dedicated to growth of high-quality and electrically doped Si/Ge nanowire heterostructures with controlled interfaces. Features of the CVD system for Si/Ge nanowire heterostructures guarantee precise control of electrical doping concentration and interfacial widths of heterostructure, uniformity in a substrate, and reproducible growth of sophisticated nanowire heterostructures. Jinkyoung Yoo CINT
2D Transition Metal Dichalcogenide Metalorganic Chemical Vapor Deposition Enabling the growth of complex nanostructures based on the III-V and III-nitride (AlGaInN) semiconductor materials systems, including nanowires (NWs) and quantum dots (QDs) Wafer-scale continuous two-dimensional materials synthesis capability provides materials platforms for defect engineering, emerging materials-based electronic/photonic device studies, and basic sciences/applications of two-dimensional materials. Jinkyoung Yoo CINT
Atomic Layer Deposition System ALD offers a unique means for the conformal deposition of dielectric and metallic films on 3D nanostructures with single atomic layer control Housed in our Integration Lab,This state-of-the-art atomic layer deposition (ALD) system, utilizes
precursor gases with single atomic layer control to enable conformal coating for nanoscale structure integration.
John Nogan CINT
Crystal Growth of Strongly Correlated Materials Metal Organic Chemical Vapor Deposition (MOCVD) enables the growth of complex nanostructures based on the III-V and III-nitride (AlGaInN) semiconductor materials systems, including nanowires (NWs) and quantum dots (QDs) Priscila Rosa CINT
DC Sputtering/Thermal Evaporation System for Metal Film Growth: Sequential Depositions and Uniform, Thick Films The AJA International, Inc. ATC Orion Series Combination DC Sputtering/Thermal Evaporation System provides ease-of-use and operating flexibility. The magnetron sputtering sources feature a modular magnet array that allow operations in a variety of modes depending on the particular application for a specific film deposition run. Jennifer Hollingsworth CINT
Design, Engineering, and Synthesis of Biomolecular Building Blocks Produce, modify, and integrate a range of structural and functional biomolecules with nanoscale synthetic materials and systems. Because native biological molecules are, in general, poorly suited for use in synthetic systems, this capability is focused on developing building blocks motors with enhanced stability and providing strategies for bridging living and non-living components through a common interface and functional material or system. George Bachand CINT
Electrochemical Deposition and Surface Modification Electroplating, electroforming, anodizing, electropolishing, and electrolytic etching and corrosion, for any commonly plated metal on nearly any substrate. Dan Hooks CINT
Epitaxial and Nano-Composite Metal-Oxide Films Synthesize a variety of functional oxide thin films, investigate the effects of strain, defects and interface on the functionalities, and study emergent quantum phenomena and applications in electronic devices Aiping Chen CINT
Fully Automated Batch Reactor System (FABRS): Computer-Controlled Multi-Step Synthesis and Real-Time In-Situ Diagnostics A versatile and powerful tool for controlled, quasi-combinatorial solution-phase synthesis of simple and complex nanostructures, especially heterostructured nanoparticles like thick-shell ("giant") core/shell quantum dots and multicomponent/multifunctional nanoparticles, as well as an option for scaling-up optimized reactions. Jennifer Hollingsworth CINT
In-situ Physical Vapor Deposition System for Novel Materials Synthesis Monitor physical properties during the growth of metal and oxide thin films. With four DC magnetron sputtering guns (two capable of RF sputtering), a heated substrate holder, and a biased stage, we can deposit a number of novel materials including complex oxides, high entropy alloys, and thick epitaxial films. The laser curvature tool and surface acoustic wave (SAW) monitoring system, measure internal stress and modulus of films as they are being growth. Benjamin Derby CINT
Low-Pressure Chemical Vapor Deposition A low pressure chemical vapor deposition (LPCVD) / diffusion furnace located in the CORE Integration Lab. Mechanical support allows for high-density films (e.g. low imperfections) without significant stresses. For micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), the ability to tailor the stress is key as stress and stress gradients are dominant, device failure-inducing mechanisms. John Nogan CINT
Magnetic and Metallic Nanoparticle Synthesis Emphasizing the preparation of high-quality metal nanocrystals with a target functionality in mind. Working closely with physicists and theorists who inform our synthetic work, we exploit or develop new methods that afford control over particle size-dispersity, crystallinity, stability, and magnetic properties, e.g., plasmonic, catalytic, and low-melting compositions as growth fluxes for nanowire growth. Pursue nanocrystal chemical-precursor development and ligand/surfactant development when necessary. We strive to understand and optimize the effects of particle size, shape, internal heterostructuring, and surface structure/functionalization on nanocrystal properties. Sergei Ivanov CINT
Non-Blinking Quantum Dots: Synthesis and Applications Non-blinking nanocrystal quantum dots (NQDs) that emit in the visible and the near-infrared — developed by exploring effects of shell thickness, core size, core/shell electronic structure, and internal nanoscale interface properties. These NQDs are also characterized by strongly suppressed Auger recombination and are essentially non-photobleaching. Their characteristic large effective Stokes shift affords minimized self-reabsorption. Their improved performance compared to conventional NQDs has been demonstrated in solid-state light-emitting devices as well as in biological applications as single-molecule optical probes. Although known as "giant" NQD (g-NQDs), these unique optical nanomaterials are still typically <15 nm in size. We continue to advance new g-NQD compositions and applications and aim to engage with Users in fundamental studies and further demonstrations of enhanced applications. Jennifer Hollingsworth CINT
Organic-Inorganic Hybrid Perovskite and Electronic Device Integration High quality perovskite single crystal and thin film deposition techniques for opto-electronic device integrations Wanyi Nie CINT
Physical Synthesis of Nanostructured Materials Synthesize metal, alloy, ceramic, or composite materials where the internal nanostructuring dimension — layer thickness, grain size, or particle size — with exceptional control down to the nanometer (nm) level Yongqiang Wang
Kevin Baldwin
CINT
Polymeric Monolayer Systems Monolayer synthesis allows researchers to tailor surface properties utilizing small molecule organic synthesis and polymerization techniques. Surface properties are critical in many nanosystems, and the control of surface properties such as wetting, adhesion, and friction are of primary concern. Either in-situ or ex-situ syntheses can be performed where appropriate. Multilayers or gels may be produced using similar techniques. Dale Huber CINT
Prokaryotic and Eukaryotic Cell Culture Facilities Grow and maintain prokaryotic and eukaryotic cells. Explore a wide variety of nanoengineered substrates, nano-probes (e.g., quantum dots), and nanoscale imaging techniques for the study of physiological cell behaviors. CINT has the capabilities to grow and maintain prokaryotic (i.e., bacterial) and eukaryotic (e.g., fungal) cells and mammalian cell lines, as well as tissues.

Lisa Phipps

Dean Morales

CINT
Semiconductor Nanocrystal Synthesis: Optical Nanomaterials by Design Emphasizing the preparation of high-quality semiconductor nanocrystals — quantum dots and quantum rods — while exploiting or developing new methods that afford control over particle size-dispersity, crystallinity, stability and optical/electronic properties. Nanocrystals prepared with target functionality in mind. You will work closely with physicists, spectroscopists and theorists who inform our synthetic work. We strive to understand the
effects of particle size, shape, internal heterostructuring, ectornic structure, and surface structure/functionalization on nanocrystal properties and to optimize these properties.
Jennifer Hollingsworth CINT
Semiconductor Nanowires: Solution-Phase Synthesis and Novel Flow-Solution-Liquid-Solid Growth Synthesize high-quality, single-crystalline semiconductor nanowires for a range of compositions using a solution-phase catalyzed growth process known as solution-liquid-solid (SLS) growth. Modify this technique to grow complex nanowire heterostructures in flow. Use colloidal synthesis methods, in particular solution-phase catalyzed growth processes, to synthesize high-quality, single-crystalline semiconductor nanowires for a range of compositions, including II-VI, III-V, IV-VI, III2VI3 and I-III-VI2 systems. Jennifer Hollingsworth CINT
Two-dimensional Nanomaterials Stacking Fabricate heterostructures composed of two-dimensional materials and freestanding membranes with controls of translational and rotational movements in high resolutions Jinkyoung Yoo CINT
DC Sputtering for Deposition and Co-Deposition of Pure Metals, Dielectric and Ceramic Materials Utilize precursor gases with single atomic layer control. Housed in our Integration Lab, this state-of-the-art atomic layer deposition (ALD) system utilizes precursor gases with single atomic layer control to enable conformal coating for nanoscale structure integration. The unique isolation chimney prevents cross-contamination of target materials and allows deposition profiles to be fine-tuned, affording sequential deposition of a series of metals (2–4) in single runs (without breaking vacuum). John Nogan CINT
Atomic Precision Advanced Manufacturing Atomic-Precision Advanced Manufacturing (APAM) Si Nanoelectronics Capability. This instrument, in association with etch and deposition capabilities, provides powerful nanofabrication of a wide variety of materials and applications. Ezra Bussmann CINT
Electron Beam Lithography The JEOL JBX-6300FS electron beam lithography system is a state-of-the-art tool capable of field emission operation at 100 kV acceleration voltage. With a minimum spot size of less than 3 nm, the system is capable of line widths less than 8 nm in resist. A 19-bit beam deflection amplifier allows beam steps down to 1.25 Å at 100 kV. Overlay and field stitching accuracy is better than 20 nm in high resolution writing mode. This instrument, in association with etch and deposition capabilities, provides powerful nanofabrication of a wide variety of materials and applications. Anthony James CINT
High-Speed Nanomanufacturing R&D scale capabilities for patterning materials and topographies using digital and roll/sheet-based technologies. Bryan Kaehr CINT
CINT INTEGRATION LAB — GENERAL LAB CAPABILITIES 9000 square foot class 1000/10,000
Temperature maintained at 70°F (+/– 1°F)
relative humidity 40% (+/- 10%)
Operating hours: 6:00 a.m. to 12:00 p.m., seven days a week.
John Nogan CINT
CINT INTEGRATION LAB — BEOL/ASSEMBLY John Nogan CINT
CINT INTEGRATION LAB — DEPOSITION/ANNEAL John Nogan CINT
CINT INTEGRATION LAB — DRY ETCH EQUIPMMENT John Nogan CINT
CINT INTEGRATION LAB — LITHOGRAPHY John Nogan CINT
CINT INTEGRATION LAB — METROLOGY John Nogan CINT
CINT INTEGRATION LAB — WET PROCESSING John Nogan CINT
Nanoimplantation at the CORE Ion Beam Laboratory The Ion Beam Materials Laboratory (IBML) is a Sandia National Laboratories resource devoted to the characterization and modification of surfaces through the use of ion beams Michael Titze CINT
Metamaterials and Plasmonic Nanofabrication Extensive capabilities for nanofabrication of plasmonic and metamaterial samples, on both passive, dielectric substrates (glass or undoped semiconductors) and active, semiconductor heterostructure substrates. Arrays of dielectric or plasmonic resonators (metasurfaces or photonic crystals) or single nanoantennascan be fabricated using a variety of tools and techniques including electron beam lithography, liftoff, etching, focused ion beam milling, etc. We routinely fabricate metasurfaces of dielectric materials such as TiO2, silicon and a variety of III-V semiconductors such as GaAs, InGaAs, AlGaAs, etc. The metasurfaces can be patterned directly onto the semiconductor substrates or transferred onto transparent substrates such as quartz or sapphire. Typical dimensions range from 50 to hundreds of nanometers or microns. Target wavelengths can range from the visible to the mid–far infrared. Igal Brener CINT
Micro-Nano Fabrication Utilize distinctive platforms for investigating standard or hybrid materials. Our 100 mm facility has an exceptional tool set, which accommodates a wide range of substrates, films, and chemicals. We work closely with other centers and laboratories to integrate unique materials or processes into prototype micro/nano systems. John Nogan CINT
Multiphoton Lithography Ultra-high-resolution 3D printing Bryan Kaehr CINT
Two-Photon Grayscale Lithography Grayscale Lithography using Two-photon-enabled Laser Scanning System Bryan Kaehr
Chun-Chieh Chang
CINT
Biomolecular Recognition and Phage Display Create recognition molecules through biological means. Nature utilizes molecular recognition for the control of protein-protein and protein-inorganic interactions that are key for control of cell-cycle processes and for the exquisite assembly of inorganic materials. We have the ability to create recognition molecules through biological means (phage display). These ligands can be used for recognition ligands in biosensors or for the hierarchical assembly. Lisa Phipps CINT
Dip-Pen Nanolithography (DPN) Nanoink 5000 System: Nano-Mesoscale Materials Integration/Single-Photon-Source Fabrication/Hybrid-Materials Creation A state-of-the-art commercial direct-write, AFM tip-based lithography technique capable of multi-component deposition of a wide range of materials with nanoscale registry Jennifer Hollingsworth CINT
Mesenchymal Stem Cell Fate and Differentiation We actively culture and differentiate adult-derived mesenchymal stem cells for the study of their interaction and altered cell-fate with polymers, nanostructured substrates (hard and soft materials of varied tensile strength and patterning), and radiation of varied frequencies. Studies can include detailed static or dynamic mRNA expression levels, protein expression levels, and morphology (flow cytometry and/or confocal microscopy). Lisa Phipps CINT
Polymer Pen Lithography for Rapid Replica Generation of Patterned Soft Materials A lithographic patterning tool for soft nanomaterials including polymers, nanoparticles, DNAs, proteins, and virus particles. Polymer Pen Lithography (PPL) is a lithographic patterning tool for soft nanomaterials including polymers, nanoparticles, DNAs, proteins, and virus particles, all of which are hard to pattern on a surface with high precision using conventional lithographic techniques. The instrument utilizes soft-material pen arrays to print up to 100,000+ duplicate patterns of arbitrary design (no mask or mold needed) simultaneously onto a substrate with down to sub-100 nm resolution. Kyungtae Kim CINT
Soft Material Fossilization and Nano-Replication Expertise in shape-preserved replication of biological cells, tissues and organisms for cellular (re)engineering, specimen preservation and enhanced functions. Using sol-gel approaches, lithographically defined biopolymers, gels, and single cells can be replicated into both hard (silica, glassy carbon, etc.,) and soft synthetic (e.g., PEG) materials with < 10 nm precision. Bryan Kaehr CINT
2D and 3D Single Molecule and Particle Tracking Custom 3D tracking microscope via confocal feedback and conventional 2D single molecule tracking via fluorescence microscopy with an EM-CCD camera. Unique in-house developed capabilities in active feedback for time-resolved 3D tracking of single nanoparticles, organic dyes, and fluorescent proteins. Jim Werner
Dean Morales
CINT
4D Scanning Transmission Electron Microscopy (4D STEM) 4D scanning transmission electron microscopy enabled by detector advances and post-experiment computational algorithms. 4D-STEM is capable of wide field-of-view (FOV) nano structural characterization with a spatial resolution on the order of 1 nm, giving users both strain and orientation information at the nanoscale in addition to whole-pattern diffraction analysis. This capability is available at both the Core and Gateway facilities. Stephen House (Core)
Matthew Schneider (Gateway)
Michael Pettes (Gateway)
CINT
Atomic Force Microscopy Routine and advanced imaging capabilities. CINT has multiple Atomic Force Microscopy (AFM) systems that can be leveraged to perform a variety of sample imaging modalities. Andy Jones
Dan Hooks
CINT
Atomic Force Microscopy-based Modulated NanoIndentation (MoNI) Measure the mechanical properties of 1D and 2D materials. An atomic force microscopy-based modulated nanomechanical measurement technique to probe the nanomechanical properties in 1D and 2D materials and their deformation mechanisms with sub-Angstrom and nN resolution. Remi Dingreville CINT
Cryogenic Electron Microscopy (Cryo-EM) Suite Imaging of soft matter, nanomaterials, and beam-sensitive materials. The Cryo-EM Lab houses instruments for imaging of soft matter, nanomaterials, and beam sensitive materials in their native, hydrated state. John Watt CINT
CEM Microwave Reactor CEM Microwave Reactor containing a single-mode cavity operates in both pressurized and open vessel modes. CEM Microwave Reactor with AutoSampler can run multiple reactions using 10mL and 35mL sealed Vessels. Darrick Williams CINT
Deep Ultraviolet (DUV) Raman and Photoluminescence This lab provides excitation at 5.08 eV, above the fluorescence regime of many functional nanomaterials. The Deep Ultraviolet (DUV) Raman and Photoluminescence laboratory is comprised of an advanced deep ultraviolet confocal Raman and photoluminescence imaging and micro-spectroscopy system (244, 488, 532, and 633 nm excitation) including a suite of precision electronics and polarization optics, and a variable temperature cryostat (2.7–500 K) for complex in situ characterization of materials emitting in the 200-1100 nm spectral window. A FEI- and confocal Raman-compatible 9-pin heating/electrical biasing transmission electron microscopy sample holder in the allows for in situ TEM correlation of atomic-structure at with optical properties. Michael Pettes CINT
High Resolution Scanning Electron Microscope, Focused Ion Beam, and Electron Beam Lithography Two FEI field-emission source SEMs in the Integration Lab at CINT. The Nova NanoSEM 450 includes a Nabity electron beam lithography (EBL) patterning capability. The Nova 600 Nanolab from FEI Company combines ultrahigh resolution SEM with FIB capabilities in one system for sample analysis, 2D and 3D machining, and prototyping. The resolution of 1.1 nm at 15 kV in secondary electron mode is further enhanced when using the STEM detector. This dual-beam system also allows for electron and ion induced deposition of metals from gas source precursors (currently, Pt) with line widths of 50 nm (ion beam) and 20 nm (electron beam). An auto FIB, auto TEM, and pattern generation module is available for ion milling to provide automation of many
tasks. The system also includes a Nabity EBL patterning capability.
Doug Pete CINT
High-Resolution X-Ray Diffraction System with Small Angle Scattering The XRD instrument is comprised of a high-precision XRD platform with small-angle x-ray scattering, 2D area detector (HyPix 3000) and variable temperature thin-film, and microdiffraction accessories. Sergei Ivanov
Sadhvikas Addamane
CINT
Ion Beam Materials Laboratory — Gateway The Ion Beam Materials Laboratory at LANL is a pioneer accelerator lab devoted to the characterization and modification of surfaces through the use of ion beams. The 6,000 sq. ft. facility hosts several accelerators, sample preparation lab space, a meeting space with remote conference AV equipment, and a kitchen. Yongqiang Wang CINT
Magellan Scanning Electron Microscope The ideal tool for investigating nanotubes, nanowires, nanocomposites, and other materials when workhorse SEMs lack the low-voltage resolution required for sensitive surface imaging. The FEI Magellan 400 SEM provides sub-nanometer spatial resolution from 1kV to 30 kV. By using low voltages, only the surface of the sample interacts with the electron beam and thus insulators/beam sensitive samples can be imaged without the need for conductive coatings and the amount of surface data is maximized. Chris Sheehan CINT
Optical Microscopy and Single Molecule Spectroscopy Advanced spectroscopic techniques can be combined with optical microscopy to provide a suite of tools for characterizing spatially dependent properties of nanoscale materials Jim Werner
Dean Morales
CINT
Rigaku SmartLab XRD System The new industry standard for multipurpose X -ray diffractometers. A highly versatile automated X -ray diff raction (XRD) system, the newest SmartLab diff ractometer off ers continued refinement of the ease-of-use features that enabled the original SmartLab diff ractometer to receive the coveted R&D 100 Award, such as automatic alignment, component recognition, Cross Beam Optics and a 2D detector. SmartLab began as the flagship model from Rigaku in 2006 and new leading-edge, advanced technologies have been continuously introduced over the years. This newest addition to the SmartLab series of high-resolution X-ray diff raction analyzers is engineered to provide the best performance in all X -ray diff raction or scattering applications by offering not only breakthrough hardware, but also advanced “User Guidance” functionality within the new SmartLab Studio II software. Darrick Williams
Aiping Chen
CINT
Scios 2 Lo-Vac Focused Ion Beam Scanning Electron Microscope Focused ion beam scanning electron microscope for ultra-high resolution, high-quality sample preparation and 3D characterization. The Scios 2 LoVac Dual Beam Scanning Electron Microscope (SEM) produces fast and high resolution images from a variety of different conductive and non-conductive samples through electron beam imaging in high/low vacuum environments. Darrick Williams CINT
Small-Angle / Wide-Angle X-Ray Scattering A state-of-the-art tool for characterizing size and structure of nanomaterials ranging 1-1000 nm. The versatile Xenocs Xeuss 3.0 supports wide q-range and covers USAXS, SAXS, and WAXS (0.0001–4.0 Å−1) to characterize a wide range of nanomaterials
including polymers, biomacromolecules, and inorganic/metallic nanoparticles and films.
Kyungtae Kim CINT
Specialized Sample Prep Tools For demanding electron-beam and optical microscopy and nanomechanics characterization. More demanding electron-beam and optical microscopy and nanomechanics characterization studies may require specialized sample preparation for optimal results. For these studies, CINT maintains high-performance sample preparation tools to be used in conjunction with the characterization effort(s), including: Brad Boyce CINT
Super Resolution Optical Imaging Image static cellular structure or selected nanomaterials. A super-resolution microscope based upon single molecule detection and localization (e.g. PALM, STORM, or d-STORM), including both acquisition and analysis software. Jim Werner
Dean Morales
CINT
Tecnai G2 F30 S-TWIN Microscope A multi-purpose, multi-user tool with TEM, EFTEM & STEM operating modes. The Tecnai G2 F30 S-TWIN microscope provides optimal balance between contrast at high inclination angles and excellent resolution. With a dedicated tomography holder, even larger tilt angles are possible, allowing high-resolution tomography on the system. John Watt
Winson Kuo
CINT
Environmental Transmission Electron Microscopy Providing dynamic information on inorganic catalysts and nanomaterials under relevant reaction conditions and features. A state-of-the-art image-corrected monochromated Titan Environmental Transmission Electron microscope (ETEM), 300 kV, provides the capability to resolve reactions between materials and gaseous environments during atomic-resolution (1 Å) imaging. Stephen House CINT
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