The Scios 2 LoVac dual-beam focused ion beam (FIB) scanning electron microscope (SEM) is a versatile tool for high-resolution imaging, 2D & 3D analysis, and high-quality sample preparation. A variety of conductive and non-conductive samples can be examined with the electron beam in high/low vacuum environments.

Capabilities include:

• Electron optical column optimized for resolution and beam stability.
• Carbon and platinum e-beam and I-beam deposition.
• Gallium ion beam milling.
• Gas Chemistry technology for enhanced milling rates including Thermo Fisher Scientific proprietary gases, such as Selective Carbon Mill.
• Beam deceleration – +50 eV to -50 eV landing energy.
• Easy-Lift nanomanipulator for sample manipulation and creating lift-outs.
• EDAX Octane Elite EDS.
• EDAX Velocity EBSD – structural and crystallographic information.

Technical Specifications:

• Electron beam accelerating voltage = 200 V to 30 kV
• E-beam current = 1 pA to 400 nA
• Ion beam accelerating voltage = 500 v to 30 kV
• I-beam current = 1.5 pA to 65 nA
• SEM resolution (30 kV) = 0.7 nm
• SEM resolution (1 kV) = 1.4 nm (1.2 with beam deceleration)
• Multiple Detectors:
  • Everhart-Thornley (EHT) secondary electron detector.
  • T1 segmented lower in-lens detector.
  • T2 upper in-lens detector.
  • Ion-conversion and electron (ICE) detector).
  • Retractable directional back-scattered (DBS) detector – including concentric (CBS) and angular sectors (ABS) modes.
  • STEM 3+ detector (BF, DF, HAADF segments)

Software

• Maps 3 software – automated acquisition of image mosaics.
• Auto Slice and View 4 – automated serial sectioning and imaging.
• AutoTEM 4 – automated lift-out and thinning of TEM samples
• 3D EBSD plugin

Contact: Winson Kuo