UV-Visible Variable Angle Spectroscopic Ellipsometer (VASE) Capabilities include:

• Spectral coverage from 0.24 μm–2.5 μm.
• Ellipsometric measurements on a small sample area.
• May be used as scatterometer.
• Reflection and transmission measurements to yield absorption information.
• Attenuated total reflection measurements to study surface photonic states.

These features are particularly useful for metamaterials, photonic crystals, gratings, and nano-antenna arrayed with only a small patterned area. 

IR Variable Angle Spectroscopic Ellipsometer (IR-VASE) Capabilities include:

• Covers a spectral range of 2 μm–40 μm.
• Sample can be heated to maximum of 300°C. When using this heater stage only a single angle of incidence of 70° is available.
• Optical characterization of thin films and substrates in these spectral ranges, for example refractive index (n) and extinction (k) coefficients, or real and imaginary parts of permitivities.

Contact: Chloe Doiron