Refurbished in 2023 with new Telemark, self-sealing source,  power supply, beam and sweep controllers, deposition and automatic indexer. Six-pocket 15cc hearth with single thermal source.  Water cooled metal bell jar with highly versatile rotating stage.  Can accommodate multiple wafers, small pieces through 200mm. Each.  Horizontal stage, face down; samples are typically secured with metal clips or Kapton tape to a 100mm carrier.  Ebeam materials: Ag, Al, Au, Co, Cr, Ge, Mo, Ni, Pd, Pt, Ti, W.  Thermal boat materials: Al, Cr, Au.  Thermal boats are limited to 500-1000Å (without stage rotation), depending on material.  Machine undergoing a control system renovation however available on request for thermal evaporation.

Capabilities  include:

• Room temperature, 16” diameter platen capable of batch processing of small samples and up to twelve, 100mm substrates or any combination in a single run; 150 and 200mm possible.
• Supports up to six 15cc crucibles covering most common metals and a variety of dielectric thin film deposition needs. Room temperature, non-reactive processing.
• Dual Quartz Crystal Microbalances for precision deposition rate measurement and independent control of thermal and Ebeam power supplies.
• Recently refurbished with modernized ergo friendly chamber/platen design, new Telemark deposition controller, programmable sweep generator, source, automatic indexer and 10 kV High Voltage solid-state DC power supply.

Contact: John Nogan