Contact 

Tzu-Ming Lu is a Senior Member of the Technical Staff at Sandia National Laboratories. His research topics include spin-based quantum computing, spin-orbit coupling, and quantum behavior of nanoscale structures. 

Expertise

• Materials development and nanoscale fabrication for integrated solid-state (semiconducting, superconducting, magnetic) devices
• Electronic transport at deep cryogenic temperatures
• Solid-state device materials and devices characterization

Capabilities

• Atomic Layer Deposition System
• CINT Integration Lab — BEOL/Assembly
• CINT Integration Lab — Deposition/Anneal
• CINT Integration Lab — Dry Etch Equipment
• CINT Integration Lab — General Lab Capabilities
• CINT Integration Lab — Lithography
• CINT Integration Lab — Metrology
• CINT Integration Lab — Wet Processing
• DC Sputtering for Deposition and Co-Deposition of Pure Metals, Dielectric and Ceramic Materials
• Electron Beam/Thermal Physical Vapor Deposition of Multilayer, Pure Metal Thin Films
• Low-Pressure Chemical Vapor Deposition
• Micro-Nano Fabrication
• Variable Temperature Electronic Transport

Education

PhD, Electrical Engineering, Princeton University